General information
Organisation
The French Alternative Energies and Atomic Energy Commission (CEA) is a key player in research, development and innovation in four main areas :
• defence and security,
• nuclear energy (fission and fusion),
• technological research for industry,
• fundamental research in the physical sciences and life sciences.
Drawing on its widely acknowledged expertise, and thanks to its 16000 technicians, engineers, researchers and staff, the CEA actively participates in collaborative projects with a large number of academic and industrial partners.
The CEA is established in ten centers spread throughout France
Reference
SL-DRT-24-0679
Direction
DRT
Thesis topic details
Category
Technological challenges
Thesis topics
3D chemical investigation of 10 nm FDSOI CMOS devices.
Contract
Thèse
Job description
The development of 10 nm FDSOI (Fully Depleted Silicon On Insulator) technology leads to new constraints on the architecture of transistors. The gate width (10 nm) requires a specific integration of the gate that controls the threshold voltage. The variability of the threshold voltage depends on the concentration, spatial distribution and chemical nature of dopants in the source and drain area. Therefore, it is crucial to understand the impact of growth conditions of the metallic gate, source, drain and annealing temperature to activate the dopant. To master these new constraints, the use of characterization techniques that can identify the structural and chemical mechanisms (distribution and quantification) acting in the gate, source and drain will be essential. Among all the chemical characterization techniques, Atom Probe Tomography is the technique of choice that offers a 3D chemical and quantitative mapping of a sample with nanometre scale resolution.
The objectives of this PHD will be to: (i) develop 3D characterization methodologies (distribution and chemical composition of species within the gate and source-drain area) of transistors, (ii): investigate the impact of growth conditions, annealing temperature activating the dopants and implantation dose. The PHD student will try to model the formation mechanisms of the observed chemical compounds.
University / doctoral school
Ingénierie - Matériaux - Environnement - Energétique - Procédés - Production (IMEP2)
Université Grenoble Alpes
Thesis topic location
Site
Grenoble
Requester
Position start date
01/11/2024
Person to be contacted by the applicant
GRENIER Adeline adeline.grenier@cea.fr
CEA
DRT/LETI/DPFT/SMCP/LASI
CEA-LETI
17 rue des Martyrs
38000 Grenoble
04-38-78-08-45
Tutor / Responsible thesis director
DE GEUSER Frédéric frederic.de-geuser@grenoble-inp.fr
CNRS
Grenoble INP - Université Grenoble Alpes - CNRS (SIMaP)
SIMaP (Science et Ingénierie des Matériaux et des Procédés)
Grenoble INP - Univ. Grenoble Alpes - CNRS
Groupe Physique du Métal
Bureau 024, bat Thermo.
1130 Rue de la Piscine BP 75
38 402 St Martin d'Hères Cedex
0476826726
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