General information
Organisation
The French Alternative Energies and Atomic Energy Commission (CEA) is a key player in research, development and innovation in four main areas :
• defence and security,
• nuclear energy (fission and fusion),
• technological research for industry,
• fundamental research in the physical sciences and life sciences.
Drawing on its widely acknowledged expertise, and thanks to its 16000 technicians, engineers, researchers and staff, the CEA actively participates in collaborative projects with a large number of academic and industrial partners.
The CEA is established in ten centers spread throughout France
Reference
SL-DRT-25-0198
Direction
DRT
Thesis topic details
Category
Technological challenges
Thesis topics
Low temperature selective epitaxial growth of SiGe(:B) for pMOS FD-SOI transistors
Contract
Thèse
Job description
As silicon technologies for microelectronics continue to evolve, processes involved in device manufacturing need to be optimized. More specifically, epitaxy, a crystal growth technique, is being used to fabricate 10 nm technological node FD-SOI (Fully Depleted-Silicon On Insulator) transistors as part of CEA-Leti's NextGen project. Doped and undoped Si and SiGe semiconductor epitaxy is being developed to improve the devices' electrical performances. The thesis will focus on selective SiGe(:B) epitaxy for channels and source/drains of pMOS transistors. A comparison of SiGe and SiGe:B growth kinetics will be made between growth under H2, the commonly used carrier gas, and N2. Innovative cyclic deposition/etching (CDE) strategies will also be evaluated, with the aim of lowering process temperatures.
University / doctoral school
Ecole Doctorale de Physique de Grenoble (EdPHYS)
Université Grenoble Alpes
Thesis topic location
Site
Grenoble
Requester
Position start date
01/10/2025
Person to be contacted by the applicant
LESPIAUX Justine 
justine.lespiaux@cea.fr
CEA
DRT/DPFT
LETI/DPFT/SSURF, CEA-GRENOBLE, 17, Avenue des Martyrs 38054 Grenoble Cedex 9, France
0438785079
Tutor / Responsible thesis director
HARTMANN Jean-Michel, François jean-michel.hartmann@cea.fr
CEA
DRT/DPFT
17 rue des Martyrs
38054 - Grenoble CEDEX 9
33 (0) 4 38 78 95 24
En savoir plus
https://www.linkedin.com/in/justine-lespiaux-epitaxy?originalSubdomain=fr
https://www.leti-cea.fr/cea-tech/leti/Pages/Accueil.aspx
