General information
Organisation
The French Alternative Energies and Atomic Energy Commission (CEA) is a key player in research, development and innovation in four main areas :
• defence and security,
• nuclear energy (fission and fusion),
• technological research for industry,
• fundamental research in the physical sciences and life sciences.
Drawing on its widely acknowledged expertise, and thanks to its 16000 technicians, engineers, researchers and staff, the CEA actively participates in collaborative projects with a large number of academic and industrial partners.
The CEA is established in ten centers spread throughout France
Reference
SL-DRT-24-0356
Direction
DRT
Thesis topic details
Category
Technological challenges
Thesis topics
Innovative dry etching process of exotic materials
Contract
Thèse
Job description
The advantageous properties (electro-optical, - acoustic, -mechanical) of new materials such as Sc-doped ALN, LNO, LTO or KNN make them essential to meet the development needs of integrated optics, RF telecommunication and microsystems. The production of patterns with submicron dimensions with a significant etch rate (>100nm/min), a vertical profile and a reduced roughness of the pattern's sidewalls are the main goals of the thesis work so as to satisfy the performance criteria of the devices targeted at the application level.
University / doctoral school
Electronique, Electrotechnique, Automatique, Traitement du Signal (EEATS)
Université Grenoble Alpes
Thesis topic location
Site
Grenoble
Requester
Position start date
01/09/2024
Person to be contacted by the applicant
CAMPO Alain 
alain.campo@cea.fr
CEA
DRT/DTSI/SPAT/LGRA
CEA GRENOBLE
0438782810
Tutor / Responsible thesis director
CHEVOLLEAU Thierry thierry.chevolleau2@cea.fr
CEA
DRT/DPFT
17 avenue de Martyrs 38054 Grenoble
04.38.78.69.85
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