This PhD project focuses on advancing all-solid-state microbatteries for miniaturized energy storage applications, such as wearable electronics, IoT systems, and implantable medical technologies. The research aims to stabilize and mitigate degradation at the electrode/electrolyte interfaces, which are critical bottlenecks in solid-state microbattery performance. The project involves two main research axes: (1) the study and optimization of ultrathin films (sub-nanometer to nanometer scale deposited by ALD) for engineering the interfaces in LiCoO2/LiPON/Li stacks, and (2) a fundamental investigation of the mechanisms responsible for interface degradation. The study will involve the fabrication and characterization of partial and complete stacks using techniques like cyclic voltammetry (CV), electrochemical impedance spectroscopy (EIS), X-ray diffraction (XRD), and scanning electron microscopy (SEM). The incorporation of alloying metals (e.g., Ag, Au) between the buffer layer and lithium will also be explored to enhance lithium-metal interface stability. The expected outcomes include an optimized microbattery stack capable of exceeding 1,000 cycles with minimal increase in interfacial resistance and a comprehensive framework describing degradation mechanisms and buffer layer effects.