General information
Organisation
The French Alternative Energies and Atomic Energy Commission (CEA) is a key player in research, development and innovation in four main areas :
• defence and security,
• nuclear energy (fission and fusion),
• technological research for industry,
• fundamental research in the physical sciences and life sciences.
Drawing on its widely acknowledged expertise, and thanks to its 16000 technicians, engineers, researchers and staff, the CEA actively participates in collaborative projects with a large number of academic and industrial partners.
The CEA is established in ten centers spread throughout France
Reference
SL-DRT-24-0299
Direction
DRT
Thesis topic details
Category
Technological challenges
Thesis topics
Development of deposit/etch processes for SADP integration to FD10 node
Contract
Thèse
Job description
Developement of new technologic nodes involves both a pattern dimension shrink and a pattern density increase. For the last years, development of multi-Patterning strategies with in particular Spacer Patterning (also called SADP) has signifcantly increased. This approach is based on a sacrificial pattern on which a material is depsosited with a conformal configuration to be etched and thus to define spacers used as masks to pattern the sublayer after sacrificial pattern removals. One of the main challenges of this intergration is the material choice in terms of compatibility (thermal budget, selectivity, etc.). Using SiCo(N)-based materials could be a favourable alternative to standard dielectrics (SiO2, SiN). Another challenge is to achieve only one population after SADP : to prevent microloading effects, etching process with an atomic controlwill be developped (ex. pulsing, ALE, etc.). Environmental footprint should be considered during these process developments.
The purpose of this thesis is to set an integration flow with SiCO(N)-based materials, to developp these materials and to determine associated etching strategies.
To lead your research activity, you would be able to benefit privileged environment offered by CEA-Leti with state of the art tool for process development and for material characterization
University / doctoral school
Electronique, Electrotechnique, Automatique, Traitement du Signal (EEATS)
Université Grenoble Alpes
Thesis topic location
Site
Grenoble
Requester
Position start date
01/10/2024
Person to be contacted by the applicant
SARRAZIN Aurélien aurelien.sarrazin@cea.fr
CEA
DRT/DPFT
17 avenue de Martyrs 38054 Grenoble
04 38 78 03 33
Tutor / Responsible thesis director
FENOULLET-BERANGER Claire claire.fenouillet-beranger@cea.fr
CEA
DRT/DPFT
CEA-Grenoble
17 rue des Martyrs
38054 GRENOBLE CEDEX
04 38 78 56 77
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