General information
Organisation
The French Alternative Energies and Atomic Energy Commission (CEA) is a key player in research, development and innovation in four main areas :
• defence and security,
• nuclear energy (fission and fusion),
• technological research for industry,
• fundamental research in the physical sciences and life sciences.
Drawing on its widely acknowledged expertise, and thanks to its 16000 technicians, engineers, researchers and staff, the CEA actively participates in collaborative projects with a large number of academic and industrial partners.
The CEA is established in ten centers spread throughout France
Reference
SL-DRT-24-0249
Direction
DRT
Thesis topic details
Category
Technological challenges
Thesis topics
Line edge roughness extraction with a sub-nanometer resolution
Contract
Thèse
Job description
Within the European Chips Act, CEA-Leti is strongly committed to support the reduction of component dimensions to reach the future technological nodes (below 10 nm). To detect and account the line edge roughness becomes critical for such small dimensions since ‘the few Angstrom error’ becomes critical (several % of error) for sub-10nm devices.
This PhD work will focus mainly on the use of CD-SAXS to define the sensibility of the technique. To do so, we propose to follow two main complementary directions: first to perform simulations with tools under developments to identify the exact impact of roughness on a CD-SAXS pattern; and secondly to lead the experimental measurements on samples specifically designed at the CEA-LETI with controlled roughness. . CD-SAXS measurements will be done both on the laboratory equipment at the CEA as well as at synchrotrons (ESRF, NSLS-II). These results will be compared with results obtained from CEA-LETI cleanroom metrology equipment, such as AFM-3D and CD-SEM.
This PhD will take place between the Nanocharacterization platform of the CEA–LETI witch offer world-class analytical techniques and state-of-the-art instruments and the cleanroom metrology team from the CEA-LETI.
University / doctoral school
Ecole Doctorale de Physique de Grenoble (EdPHYS)
Université Grenoble Alpes
Thesis topic location
Site
Grenoble
Requester
Position start date
01/09/2024
Person to be contacted by the applicant
FREYCHET Guillaume guillaume.freychet@cea.fr
CEA
DRT/DPFT
0438780456
Tutor / Responsible thesis director
FREYCHET Guillaume guillaume.freychet@cea.fr
CEA
DRT/DPFT
0438780456
En savoir plus