General information
Organisation
The French Alternative Energies and Atomic Energy Commission (CEA) is a key player in research, development and innovation in four main areas :
• defence and security,
• nuclear energy (fission and fusion),
• technological research for industry,
• fundamental research in the physical sciences and life sciences.
Drawing on its widely acknowledged expertise, and thanks to its 16000 technicians, engineers, researchers and staff, the CEA actively participates in collaborative projects with a large number of academic and industrial partners.
The CEA is established in ten centers spread throughout France
Reference
SL-DRT-24-0646
Direction
DRT
Thesis topic details
Category
Technological challenges
Thesis topics
Towards sustainable and reliable piezoelectric technology for MEMS actuator and sensor devices
Contract
Thèse
Job description
Proven or predictable shortages of materials and the necessary frugality associated with the energy transition create a constrained framework for the sustainable deployment of microelectronics and microsystems technologies. This thesis is thus part of an approach that aims to significantly reduce the environmental footprint of piezoelectric MEMS actuator/sensor technology. The latter is based on the use of a functional lead-based material, PZT (Pb(Zr,Ti)O3), and requires electrode materials such as Pt, Ru, Au, and doping elements such as La, Mn, Nb which are used to optimize piezoelectric properties and electrical reliability. The thesis work will make it possible to identify technological obstacles and propose solutions to move towards a sustainable and reliable piezoelectric MEMS technology, based in particular on Life Cycle Analyzes (LCA) and reliability data (lifetime) from existing technology at LETI. Modeling will be used to optimize the properties of lead-free piezoelectric materials considered and more generally of the actuator/sensor stack (material by design approach). It will also be necessary to take into account both the materials and the deposition/integration processes to move towards the objective of reducing the environmental impact of piezoelectric MEMS technology while retaining material/device properties in the specifications for applications targeted.
University / doctoral school
Electronique, Electrotechnique, Automatique, Traitement du Signal (EEATS)
Université Grenoble Alpes
Thesis topic location
Site
Grenoble
Requester
Position start date
01/10/2024
Person to be contacted by the applicant
MOREAU Stéphane stephane-nico.moreau@cea.fr
CEA
DRT/DCOS//LCFC
CEA-Leti
MINATEC Campus, 17 rue des Martyrs
38054 GRENOBLE Cedex 9
+ 33 (0)4-38-78-06-36
Tutor / Responsible thesis director
LE RHUN Gwenaël gwenael.le-rhun@cea.fr
CEA
DRT/DCOS
17 rue des Martyrs
38054 GRENOBLE Cedex 9
FRANCE
04 38 78 12 29
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