General information
Organisation
The French Alternative Energies and Atomic Energy Commission (CEA) is a key player in research, development and innovation in four main areas :
• defence and security,
• nuclear energy (fission and fusion),
• technological research for industry,
• fundamental research in the physical sciences and life sciences.
Drawing on its widely acknowledged expertise, and thanks to its 16000 technicians, engineers, researchers and staff, the CEA actively participates in collaborative projects with a large number of academic and industrial partners.
The CEA is established in ten centers spread throughout France
Reference
SL-DRT-24-0315
Direction
DRT
Thesis topic details
Category
Technological challenges
Thesis topics
Towards sustainable electronics: impact and understanding of the substitution of high GWP gases on plasma etching processes
Contract
Thèse
Job description
To address environmental concerns in the microelectronics industry, CEA-LETI is committed to an eco-innovation approach [1]. In this context, the development of eco-responsible processes that reduce PerFluoro-Carbon (PFC) emissions is crucial [2]. Plasma etching processes are a major emitter of PFCs because they traditionally use high GWP gases. The aim of this thesis will be to develop plasma etching processes on 300mm substrates by replacing fluorinated gases such as NF3, SF6 and CF4 with high GWP by F2 (GWP ~0). This work will involve understanding the changes induced in the etching processes for advanced devices. The dual challenge is to reduce the environmental impact while guaranteeing the high performance of these devices.
To achieve this objective, you will implement new F2-based mixtures on targeted applications for etching materials and cleaning reactors. You will provide comparative data on the performance of these new processes compared with reference processes in terms of etching results and the level of abatement of reaction by-products.
You will be based at the CEA-LETI Etching Laboratory. The work, which will be predominantly experimental on CEA-Leti's 300mm platform (see : https://www.youtube.com/watch?v=on1NH08AZfE), will benefit from the state-of-the-art process equipment and characterisation resources of the Nanotechnologies platform. The scientific and industrial interest of the subject guarantees that your work will be showcased in international communications. If you want your research to have an impact on society, apply now!
University / doctoral school
Electronique, Electrotechnique, Automatique, Traitement du Signal (EEATS)
Université Grenoble Alpes
Thesis topic location
Site
Grenoble
Requester
Position start date
01/10/2024
Person to be contacted by the applicant
BOIXADERAS Christelle christelle.boixaderas@cea.fr
CEA
DRT/DPFT//LGRA
17 rue des Martyrs
38000 Grenoble
0438780637
Tutor / Responsible thesis director
BOULARD François francois.boulard@cea.fr
CEA
DRT/DPFT/SPAT/LGRA
CEA Grenoble, 17 rue des Martyrs, 38054 Grenoble
0438782270
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