General information
Organisation
The French Alternative Energies and Atomic Energy Commission (CEA) is a key player in research, development and innovation in four main areas :
• defence and security,
• nuclear energy (fission and fusion),
• technological research for industry,
• fundamental research in the physical sciences and life sciences.
Drawing on its widely acknowledged expertise, and thanks to its 16000 technicians, engineers, researchers and staff, the CEA actively participates in collaborative projects with a large number of academic and industrial partners.
The CEA is established in ten centers spread throughout France
Reference
SL-DRT-24-0645
Direction
DRT
Thesis topic details
Category
Technological challenges
Thesis topics
Understanding Dopant Incorporation Mechanisms in Heavily-Doped Semiconductors using combinations of high resolution (S)TEM techniques
Contract
Thèse
Job description
Context: There is a need for very highly-doped semiconductor specimens for the continued development of Si/Ge CMOS devices and for doping III-V materials where the ionisation energy leads to a low concentration of carriers. In order to provide these highly doped specimens, new growth and implantion methods are required. These need to be better understood and characterised with nm-scale resolution.
Proposed Subject: We will combine various (scanning) transmission electron microscope (S)TEM techniques, such as electron holography, precession electron diffraction, spectroscopy and high-resolution imaging on the same specimen. Advanced data processing techniques will be developed in order to combine the different maps to provide information about the total dopant concentration, the quantity of dopants on substitutional sites, and the active dopant concentrations. This work will provide methodology to assess the effectiveness of the different processes that are used for doping in advanced CMOS research. This includes FD-SOI 10 nm and below, raised and embedded source and drains, Si:P, SiGe:B, Low Temperature / Coolcube.
University / doctoral school
Ecole Doctorale de Physique de Grenoble (EdPHYS)
Université Grenoble Alpes
Thesis topic location
Site
Grenoble
Requester
Position start date
01/09/2024
Person to be contacted by the applicant
BERNIER Nicolas nicolas.bernier@cea.fr
CEA
DRT/LETI/DPFT/SMCP/L2MD
0438784767
Tutor / Responsible thesis director
COOPER David david.cooper@cea.fr
CEA
DRT/DPFT
Commissariat à l’Energie Atomique
CEA - LETI MINATEC
17, rue des Martyrs - 38054
Grenoble Cedex 9
04 38 78 91 27
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