General information
Organisation
The French Alternative Energies and Atomic Energy Commission (CEA) is a key player in research, development and innovation in four main areas :
• defence and security,
• nuclear energy (fission and fusion),
• technological research for industry,
• fundamental research in the physical sciences and life sciences.
Drawing on its widely acknowledged expertise, and thanks to its 16000 technicians, engineers, researchers and staff, the CEA actively participates in collaborative projects with a large number of academic and industrial partners.
The CEA is established in ten centers spread throughout France
Reference
SL-DRT-24-0702
Direction
DRT
Thesis topic details
Category
Technological challenges
Thesis topics
Could convolutional neural network bring benefits in nanometrics etch processing?
Contract
Thèse
Job description
The development and production of energy-efficient electronic components is a major challenge for the microelectronics sector. To answer such a challenge, CEA-Leti and CNRS-LTM does not only focus on building, making and testing new architecture. We also focus on developing greener process and investigating novative solutions to reduce the environmental impact.
Precedent works on process step simulation, based on numerical approach, have already been done in CNRS-LTM institute using HPEM tools specialized on plasma etching or at CEA-LETI considering electronic microscope image processing. To be fully operational, these works still need experimental proof. Process characterization could also be another blocking point, whereas the lateral top view dimension could easily be acquire, for example using CDSEM (10 images/mn), the depth and geometry etch profile need complex and time consuming characterization such as TEM (1 image/d). By combining numerical simulation results, physical characterization and fast CDSEM image acquisition technics the PhD student would be able to train a convolutional neural network in order to predict etch profile geometry. These predictions will be helpfully in the future process development and will bring benefits in terms of time to success and financial/environmental cost reduction.
University / doctoral school
Electronique, Electrotechnique, Automatique, Traitement du Signal (EEATS)
Université Grenoble Alpes
Thesis topic location
Site
Grenoble
Requester
Position start date
01/09/2024
Person to be contacted by the applicant
PERRAUD Loïc loic.perraud@cea.fr
CEA
DRT/DPFT//LPAC
CEA Grenoble, 17 rue des Martyrs, 38054 Grenoble
04 38 78 26 98
Tutor / Responsible thesis director
CUNGE Gilles gilles.cunge@cea.fr
CNRS
CNRS/LTM
CEA - MINATEC
17 rue des Martyrs
38054 GRENOBLE Cedex 9
0438782408
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